Advances in Materials Used for MEMS Device Engineering

MEMS devices are now used in many of engineering applications. To provide maximum applications
of devices, more precise materials are required to design the devices. As micromachining processes
are technology dependant so materials should be selected with proper research. Silicon is most
suitable material for micromachining processes, so maximum of silicon compounds are used to
fabricate MEMS devices. Research is ongoing with experimentation of other application specific
materials. MEMS-VLSI integration adds another application field in MEMS industry. More materials are
now required to design devices with MEMS-VLSI integration.