Synthesis of SiOx Nano-Powders Using a Microwave Plasma Torch at Atmospheric Pressure

The silicon oxide nano-powders (SiOx-NPs) were obtained in an atmospheric microwave plasma torch using a gas-phase silicon tetrachloride (SiCl4) with N2 and H2. The gas-phase SiCl4 was injected with H2 gas into the microwave plasma torch generated by N2 and air swirl gas, and then the dark brown powders were deposited on the inner wall of a quartz tube. The sample was analyzed by an X-ray photoelectron spectroscopy (XPS), a scanning electron microscope (SEM), an energy dispersive spectrometer (EDS), and an X-ray diffraction (XRD). The average size and oxidation x values of synthesized SiOx-NPs were approximately 230 nm and 0.91, respectively. Furthermore, the volumetric charge capacity is 1127 mAh/g and has 89.2% retention after 100 cycles.